• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates generally to a mirror and a mirror carrier, in particular a mirror and a mirror carrier with a high aspect ratio, as well as a method and a means for its production.
    公开号:BE1026505B1
    申请号:E20195503
    申请日:2019-08-02
    公开日:2020-08-26
    发明作者:Martin Schaefer；Marco Weisenburger；Volker Seibert；Thomas Westerhoff
    申请人:Schott Ag；
    IPC主号:
    专利说明:

    Mirror and mirror carrier with a high aspect ratio and method and means for producing such a mirror carrier. The invention relates generally to a mirror and a mirror carrier, in particular a mirror and a mirror carrier with a high aspect ratio, and a method and a means for producing it. State of the art Mirror carriers are used, for example, in so-called mirror telescopes or in other precision optics, where they serve as a substrate for applying a highly reflective mirror layer.
    For a consistently high quality of the mirror, in particular with regard to long-term stability, the properties of the mirror support play a special role: - Weight of the mirror support If the weight of the mirror support is too high, for example because it is a mirror with a particularly large diameter, it can Deformation can occur under the weight of the mirror carrier, which affects the quality of the optical image. However, because of the improved manageability, a low weight is also generally advantageous for smaller mirror carriers.
    - Surface quality of the mirror carrier A high surface quality of the mirror carrier is required so that a reflective layer of high quality can be deposited. In particular, the roughness of the mirror surface of the mirror carrier on which the highly reflective layer is deposited is important.
    Other properties The mirror carrier should furthermore essentially comprise a material which has a high level of resistance, in particular high thermal resistance, and a low coefficient of thermal expansion. Suitable materials are in particular glasses, ceramics and glass ceramics. For example, lithium-aluminum-silicate glass-ceramics, such as those sold under the ZERODUR® or Clearceram® brands, or cordierite-based materials, or glasses with very low thermal expansion coefficients, such as synthetic quartz glass doped with TiO2 (English: fused silica), for example the glass sold under the brand name ULE®, or ceramics which comprise cordierite or SiC or consist of cordierite or SiC.
    The production of mirror carriers made of glass ceramic, for example, is generally carried out in the form that first a melt takes place and then the material is poured, whereby initially a glassy material is present. In order to avoid cracks in the material and to produce a glass ceramic from the vitreous starting material, complex temperature control is necessary, in particular slow and controlled cooling. In the manufacture of synthetic quartz glass, too, so-called ingots or larger disks are initially produced by depositing SiO2. If necessary, the diameter of disks can be increased by countersinking. This is followed by mechanical post-processing in order to obtain a workpiece in the desired dimensions and quality. In particular, the mechanical post-processing can include drilling, grinding and polishing. It is known to use documents for these post-processing steps which are arranged under the workpiece or the mirror carrier. The use of such documents is intended to prevent damage to the mirror carrier.
    In particular, it is known that for workpieces with a high aspect ratio, for example for mirror carriers with a high aspect ratio, the workpiece should be supported over the entire area during mechanical post-processing, but also, for example, during further post-processing steps such as coating or during transport. Such full-surface support of the workpiece is intended in particular to ensure that the workpiece, that is to say, for example, a mirror carrier, remains dimensionally stable, that is not deformed under the influence of gravity, for example.
    For workpieces with a large aspect ratio, for example, the German patent application DE 10 2015 112 036 A1 describes a mineral cast support for supporting a workpiece over the entire surface.
    It has been shown, however, that difficulties arise with such a mineral casting support when complex polishing processes are necessary to achieve a surface of particular quality. A large amount of heat is generated here. However, this is unfavorable with regard to the different thermal expansion between the workpiece made of a low-stretch material and the cast mineral support, so that the required accuracies with regard to the geometrical dimensions of the mirror carrier and the surface quality are not achieved in this way. From the European patent application EP 1 391 433 A2 a support made of a keatite glass ceramic is known, which can be used, for example, for forming glass or glass ceramic. However, keatite glass-ceramics also have a higher coefficient of thermal expansion compared to the low-expansion materials customary for mirror carriers. A production of mirror carriers with the required accuracies in terms of geometric dimensions and surface quality is therefore not possible here either.
    These difficulties arise to a particular degree when new types of mirror carriers with a particularly small thickness and a large diameter are addressed. Such mirror carriers cannot currently be produced, or cannot be produced in sufficient quality in terms of shape accuracy and surface quality, or even break during processing.
    There is therefore a need for mirror carriers and mirrors with a large aspect ratio with a low absolute thickness and a high surface quality and dimensional accuracy at the same time. Furthermore, there is a need for substrates which can be used for the production of mirror carriers and mirrors with a large aspect ratio, as well as for a method for producing such mirror carriers and mirrors.
    OBJECT OF THE INVENTION The object of the invention is to provide mirror carriers which overcome or at least reduce the known weaknesses of the prior art, as well as mirrors, in particular based on such mirror carriers. There is also a need for a method and a means for producing such mirror carriers and mirrors based on them. The object of the invention is achieved by the subject matter of the independent claims.
    Preferred and special embodiments can be found in the dependent claims.
    A mirror carrier according to the present invention comprises a material with a mean linear thermal expansion coefficient of less than or equal to 1 * 10 / K, preferably less than or equal to 0.1 * 10: 5 / K and particularly preferably less than or equal to 0.05 * 108 / K. According to particularly advantageous embodiments, the mirror carrier can also have an average linear thermal expansion coefficient of less than or equal to 0.02 * 10 8 / K or even less than or equal to 0.01 * 10 / K.
    The mirror carrier has at least one of the following features: the mirror carrier has a ratio of its lateral dimension to its maximum thickness of at least 100, more preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably of 300 or more, - the weight per unit area of the mirror support is 100 kg / m or less, preferably 50 kg / m or less and particularly preferably 30 kg / m , and particularly preferably 15 kg / m Or less.
    The mirror carrier has a mirror surface which has a roughness Ra of at most 3.5 μm, ideally less than 1.2 μm, the mirror surface of the mirror carrier preferably being ground.
    According to one embodiment of the invention, the maximum thickness of the mirror carrier is 50 mm or less, preferably 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less and very particularly preferably 2 mm or less.
    The lateral dimension of the mirror carrier is preferably at least 200 mm and / or at most 4500 mm. However, the invention can also be applied to mirror carriers with smaller or larger lateral dimensions.
    According to a further embodiment of the invention, the mirror carrier can be polished on a base so that the mirror carrier then has a polished mirror surface with a roughness RMS (root mean square) of less than 2 nm, preferably less than 1 nm. In the context of the present application, the following definitions and definitions apply: A mirror carrier material with a low coefficient of thermal expansion is understood to mean a material which has an average coefficient of linear thermal expansion of less than or equal to 3 * 10- / K.
    The ratio of the lateral dimension of the mirror carrier to its maximum thickness is also referred to as the aspect ratio. The aspect ratio is consequently a dimensionless quantity. As a rule, a mirror carrier has a round or approximately round shape, so that the lateral dimension is usually the diameter of the mirror carrier. If the lateral dimensions of the mirror carrier differ, for example the width of the mirror carrier has a different value than its length, the mean value is formed and used to calculate the aspect ratio.
    The thickness of the mirror carrier can vary over the extent of the mirror carrier. For example, mirror supports can have a smaller thickness at the outer edges than in the middle. The maximum thickness is used to determine the aspect ratio.
    The high aspect ratio usually results in a low weight per unit area. In one embodiment of the invention, this weight per unit area is 100 kg / m or less, preferably 50 kg / m or less and particularly preferably 30 kg / m Or less.
    The mean thermal expansion coefficient a is specified in the present application, unless expressly stated otherwise, in the range of 0-50 ° C, but the invention also relates to materials with low thermal expansion whose expansion coefficient was measured in a different temperature range. The value is the nominal mean thermal coefficient of linear expansion according to ISO 7991, which is determined in static measurements. In the context of the present invention, the terms expansion coefficient, thermal expansion coefficient, mean linear thermal expansion coefficient and a, unless expressly stated otherwise, are used synonymously.
    In the present invention, a mirror carrier is understood to be the substrate to which a highly reflective layer (or mirror layer) is applied. The term mirror carrier also includes a workpiece that is to be or is being processed into a mirror carrier, for example a semi-finished mirror carrier that has already been cut to the dimensions of the finished mirror carrier, but for which further post-processing steps have to be carried out .
    In the context of the present invention, a mirror denotes the combination of a mirror carrier and a highly reflective layer on the functional surface. The surface of the mirror carrier on which the mirror layer is applied is referred to in this disclosure as the functional surface of the mirror carrier. The highly reflective layer is also referred to as a mirror layer in the context of the present invention.
    A device is referred to here as a base which serves as a support during storage, transport and / or reworking of a workpiece that is supported, such as a mirror carrier. The document can also be referred to as support. If, within the scope of the present invention, an object is described as comprising a certain material, this also includes in particular the case that the object is predominantly, i.e. more than 50% by weight, or even essentially, i.e. more than 90% by weight. %, is made of this material. Furthermore, this can also include the case that the object consists of this material, for example also consists entirely of this material.
    In the context of the present invention, the mirror surface of the mirror carrier denotes that surface of the mirror carrier to which the mirror layer is to be applied or is applied. It is therefore a question of a quality side of the mirror carrier, that is to say a surface on which special requirements are made with regard to its surface quality.
    The mirror carrier thus comprises a material with a low mean linear thermal expansion coefficient. In particular, the mirror carrier can consist predominantly, that is to say more than 50% by weight, or even essentially, that is to say more than 90% by weight, or also completely of such a material or a mixture of such materials. Materials that have such a low coefficient of thermal expansion include in particular glasses, glass ceramics and ceramics, for example lithium-aluminum-silicate glass-ceramics, such as those sold under the brands ZERODUR®, Astrosital® or Clearceram®, or cordierite-based materials, or glasses with very low thermal expansion coefficients, such as a synthetic quartz glass (English: fused silica) doped with TiO », for example the glass sold under the trademark ULE®, or ceramics which include cordierite or SIC or consist of cordierite or SiC. A provision of a mirror carrier according to the present invention, i.e. comprising a material with a low coefficient of thermal expansion and - with an aspect ratio of at least 100, more preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably 300 or more and / or - one Surface weight of the mirror carrier of 100 kg / m or less, preferably from 50 kg / m or less and particularly preferably from 30 kg / m Or less,
    - The mirror support having a mirror surface with a roughness Ra of at most 3.5 µm, better less than 1.2 µm, was not possible.
    In particular, this was previously not possible for a maximum thickness of the mirror carrier of 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less, and very particularly preferably 2 mm or less.
    This was particularly the case for mirror carriers with a lateral dimension of at least 200 mm. In the case of mirror carriers with a lateral dimension of 1000 mm or more, maximum thicknesses of 50 mm or less, preferably 40 mm or less, more preferably 30 mm or less, could not yet be produced.
    Because of the large aspect ratio and the small absolute thickness, the surface of the mirror carrier could not be processed in such a way that a low roughness Ra of at most 3.5 μm or even at most 1.2 μm resulted. In particular, it was not possible to obtain such a roughness in a grinding process. Rather, when machining such a mirror carrier, the mirror carrier broke during post-processing before a correspondingly low roughness could be achieved. According to one embodiment, the mirror surface has a roughness Ra of at most 3.5 μm, preferably at most 1.2 μm, as shown, the functional surface of the mirror carrier preferably being ground.
    This, too, was previously not possible.
    Difficulties in the production of such mirror carriers were in particular that a large amount of thermal energy is released during a post-processing process such as grinding, lapping or polishing, with which the low roughness addressed here is to be achieved. In other words, the mirror carrier and the base used in the post-processing process heat up. In the processes required here, this heating is so considerable that thermomechanical tensions can arise between the base and the mirror carrier on it, and this occurs in particular when the base has a high coefficient of thermal expansion.
    According to a further embodiment of the invention, the mirror support comprises a glass ceramic, preferably a lithium aluminum silicate glass ceramic, the lithium aluminum silicate glass ceramic preferably being designed as a high quartz mixed crystal glass ceramic, a Ti-doped synthetic quartz glass and / or a ceramic, preferably a ceramic comprising cordierite and / or SiC.
    In particular, the mirror carrier can consist predominantly, that is to say more than 50% by weight, or essentially, that is to say more than 90% by weight, or even completely of such a material.
    Such materials generally not only have low coefficients of thermal expansion, but also generally good reworkability, such as good grindability and polishability.
    According to a further aspect, the invention also relates to a mirror, in particular a mirror comprising a mirror carrier according to embodiments of the present invention. The mirror comprises a highly reflective layer on the mirror surface of the mirror carrier.
    A further aspect of the present invention relates to a base for preferably full-surface support of a mirror carrier on top, in particular a mirror carrier according to embodiments of the invention, during its processing and / or transport. The base comprises a material with a mean linear thermal expansion coefficient of less than or equal to 1 * 10- / K, preferably less than or equal to 0.1 * 10 8 / K and particularly preferably less than or equal to 0.05 * 10-8 / K . According to special embodiments, the expansion coefficient of the base can even be less than or equal to 0.02 * 108 / K or even less than or equal to 0.01 * 108 / K.
    In particular, the base can consist predominantly, that is to say more than 50% by weight, or even essentially, that is to say more than 90% by weight, or also completely of this material or a mixture of such materials. The base preferably has a lateral dimension of generally at least 200 mm and at most 4500 mm.
    The base is thus suitable for processing and / or for transporting mirror carriers with a large lateral dimension. At the same time, the material encompassed by the base with a mean linear thermal expansion coefficient of less than or equal to 1 * 10- / K, preferably less than or equal to 0.1 * 108 / K and particularly preferably less than or equal to 0.05 * 108 / K (and, according to special embodiments, even less than or equal to 0.02 * 10 / K or even less than or equal to 0.01 * 10-8 / K) ensures that even with a large amount of heat generated during post-processing, such as grinding, Lapping or polishing, there is only a slight thermal expansion of the substrate.
    The surface of the base here denotes that surface of the base on which the mirror carrier rests at least partially during reworking and / or transport. According to a further embodiment of the base, the surface of the base is arched. The surface of the base is preferably approximated by an envelope curve.
    The envelope curve can be understood here as a predetermined shape or geometry of the surface of the base. The quality of the base is then also characterized by the deviation that exists between the real surface of the base and the envelope curve that ideally describes it. Depending on the diameter of the workpiece or mirror carrier, there are different, still tolerable deviations between the envelope curve and the actual surface. Particularly preferably, the deviation from the envelope curve of the base for a mirror carrier with a lateral dimension of at least 4000 mm is a maximum of 0.5 mm, preferably a maximum of 0.1 mm, more preferably a maximum of 0.05 mm, according to some embodiments even a maximum of 0.025 mm. and / or preferably for a mirror carrier with a lateral dimension of at least 2000 mm at most 0.2 mm, preferably at most 0.05 mm and more preferably at most 0.025 mm and / or preferably for a mirror carrier with a lateral dimension of 1200 mm or less at most 0 , 1 mm, preferably at most 0.05 mm and more preferably at most 0.01 mm.
    According to a further embodiment of the base, the surface of the base is at least partially covered with an intermediate material. The intermediate material can be a film, according to one embodiment a polymer film. The intermediate material can also include pitch, bitumen and / or silicone. The intermediate material, for example the film, preferably has a thickness which is at least as great as the deviation of the actual shape of the surface from the envelope curve. The intermediate material, such as a film, particularly preferably has a maximum thickness of at most 200 μm, preferably at most 100 μm, more preferably at most 50 μm or particularly preferably even at most 25 μm. A very good adaptation of the shape of the base to the envelope curve of the mirror support is beneficial here.
    Polymer foils can exhibit a non-linear spring behavior, which can lead to deviations in shape in the reflective surface of the mirror carrier after grinding. This can possibly be improved by using alternative or additional intermediate materials. Such intermediate materials can include metallic foils or pasty or gel-like materials, as well as hardening films.
    The intermediate material can thus serve, among other things, to cushion any deviations in the surface shape of the base from the ideal predetermined surface shape, which can be described by an envelope curve.
    However, the intermediate material can alternatively or additionally also fulfill other functions. For example, the intermediate material can also serve to reduce the adhesion between the base and the mirror carrier on top, so that after the
    Processing or after transporting the mirror carrier, an easy and in particular also damage-free lifting of the mirror carrier from the base is possible. If the intermediate material is designed as a polymer film, the polymer can be polyethylene (PE) and / or polypropylene (PP) and / or polystyrene (PS) and / or polycarbonate (PC) and / or one or more polyesters and / or polyether ketone (PEK) and / or polyethylene terephthalate (PET) and / or polytetrafluoroethylene (PTFE), such as Teflon®, and / or one or more tetrafluoroethylene copolymers (ETFE) and / or polyvinyl chloride (PVC).
    The intermediate material preferably comprises such materials which are designed with a temperature resistance of 150 ° C. or more. According to a further embodiment of the invention, an intermediate material is preferred which has the lowest possible coefficient of thermal expansion for such material classes. If the intermediate material is in the form of a polymer film, polymers with a temperature resistance of 150 ° C. or more are preferred. In this case, preference is also given to those polymers which have the lowest possible coefficient of thermal expansion for polymers. According to a further embodiment of the base, the intermediate material comprises polyvinyl chloride (PVC), PTFE, ETFE, PEK and / or PET. For example, the intermediate material can be designed as a polymer film comprising PVC, PTFE, ETFE, PEK and / or PET. If lower thermal loads occur in the post-processing steps, thermally less stable polymer films, for example made of polyethylene or polypropylene, can also be used.
    Furthermore, thermoplastic polymers are preferred, which at high temperatures, as can occur here during mechanical post-processing of a mirror substrate, can result in a certain flow of the film. Any deviations in the surface of the base from the envelope can be absorbed even better in this way.
    The film can be applied to the surface of the substrate in one piece as a whole or in the form of mutually spaced sections, for example in the form of individual, smaller pieces. According to one embodiment, “channels” are present in the film at least as far as the edge, so that when the mirror carrier is placed on the base, air can be discharged to the outside and the mirror carrier rests on the base. If the film is applied as a whole, such channels can also be introduced into the film subsequently, for example cut. According to a further embodiment of the base, the surface of the base is partially covered with the intermediate material, such as the film, the intermediate material being applied to the surface in the form of mutually spaced sections. The arrangement of the sections of the intermediate material can be symmetrical. One possibility for this is a radially symmetrical, for example a fourfold, radially symmetrical arrangement of the sections of the intermediate material, for example the pieces of film.
    According to one embodiment, the sections are round or elliptical. Such a configuration of the base means that a mechanical load occurring during processing or transport of the mirror carrier, for example due to the weight of the mirror carrier itself, can be absorbed particularly evenly by the entire surface of the base. Mechanical stresses in the mirror carrier can be minimized in this way. The stability of the mirror carrier on the base during processing is thus increased. According to a variant of the invention, the base can be designed in such a way that residues occurring during post-processing of the workpiece on which it is placed can be removed without leaving any residue and without damaging the workpiece itself.
    For this reason, the base can be equipped in such a way that residues that arise during machining of the workpiece can be drained off. For this purpose, the surface of the base can be smooth, for example, or it can be designed with grooves. The surface of the base can furthermore have at least one opening, for example a drain, by means of which residues arising during the machining of the workpiece can be drained off. If one or more openings are present, the intermediate material on the outer edge of the mirror carrier can also be applied free of channels or tightly or continuously, as shown in FIG. 3, since air and residues can be discharged through openings in the base.
    According to one embodiment of the invention, the drain is formed from grooves arranged like a network and consisting of radial and circular elements.
    Another aspect of the present invention relates to a composite of a base and a mirror carrier.
    The base is used to preferably support a superimposed mirror carrier over the entire surface when it is being processed and / or transported and comprises a material with an average linear thermal expansion coefficient of less than or equal to 1 * 10-5 / K, preferably less than or equal to 0.1 * 105 / K and particularly preferably less than or equal to 0.05 * 10 5 / K, according to special embodiments even less than or equal to 0.02 * 10: $ / K or even less than or equal to 0.01 * 10: 8 / K.
    The mirror carrier comprises a material with a mean linear thermal expansion coefficient of less than or equal to 1 * 10- / K, preferably less than or equal to 0.1 * 108 / K and particularly preferably less than or equal to 0.05 * 10-5 / K , according to special embodiments even less than or equal to 0.02 * 108 / K or even less than or equal to 0.01 * 108 / K.
    The mirror carrier preferably has a maximum thickness of 50 mm or less, preferably 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less and very particularly preferably 2 mm or less. The lateral dimension of the mirror carrier is preferably at least 200 mm.
    The mirror carrier has one of the following features: the mirror carrier has a ratio of its lateral dimension to its maximum thickness of at least 100, even more preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably 300 or more, Weight per unit area of the mirror support is 100 kg / m or less, preferably 50 kg / m or less, particularly preferably 30 kg / m or less, particularly preferably 15 kg / m Or less.
    According to one embodiment of the composite, the mirror surface of the mirror carrier has a roughness Ra of at most 3.5 μm, ideally less than 1.2 μm, the mirror surface of the mirror carrier preferably being ground.
    According to a further embodiment, the surface of the mirror carrier has a roughness RMS of less than 2 nm, preferably less than 1 nm, the surface of the mirror carrier preferably being polished.
    According to a further embodiment of the composite, the thermal expansion coefficients of the material encompassed by the base and the material encompassed by the mirror carrier differ from one another by a maximum of 1 * 10- / K, preferably by a maximum of 0.1 * 10: 8 / K, particularly preferably by an amount of at most 0.05 * 10-5 / K and very particularly preferably by an amount of at most 0.02 * 10 / K from one another.
    The surface of the base and the surface of the mirror carrier which rests on the surface of the base are preferably curved in opposite directions.
    In other words, the surface of the base is preferably curved in a convex manner when the surface of the mirror support resting on it is curved in a concave manner, and vice versa. The surface of the base and the surface of the mirror carrier resting on it are thus shaped complementarily in the areas lying on top of one another.
    According to one embodiment of the composite, the mirror carrier is fixed laterally on the base, wherein the mirror carrier is preferably additionally fixed to prevent it from becoming detached from the base.
    Yet another aspect of the invention relates to a method for producing a mirror carrier, in particular a mirror carrier according to one of the preceding embodiments. The method comprises the following steps: - Providing a base for preferably full-surface support of a mirror carrier on top, - Providing a mirror carrier comprising a material with a thermal expansion coefficient of less than or equal to 1 * 10-8 / K, preferably less than or equal to 0, 1 * 108 / K and particularly preferably less than or equal to 0.05 * 108 / K, - placing the mirror carrier on the base, - mechanical reworking, in particular polishing, drilling, grinding or lapping, of a surface of the mirror carrier, in particular its mirror surface, wherein the thermal expansion coefficients of the material encompassed by the base and the material encompassed by the mirror carrier differ from one another by a maximum of 1 * 10% / K, preferably by an amount of at most 0.1 * 10- / K, particularly preferably by an amount of at most 0.05 * 105 / K and very particularly preferably by an amount of at most 0.02 * 108 / K .
    According to special embodiments of the method, it is also possible for the material comprised by the mirror carrier to have a coefficient of thermal expansion of less than or equal to 0.02 * 105 / K or even less than or equal to 0.01 * 108 / K.
    The functional surface of the mirror carrier is arranged opposite to the surface resting on the base. In order to enable safe processing and / or safe transport of the mirror carrier, in a preferred embodiment the mirror carrier is fixed to the base at least against a lateral displacement relative to the base. The mirror carrier is preferably also secured or fixed against being lifted off or detached from the base. The fixing can be done in particular by clips, adhesively or by a negative pressure between the base and the mirror carrier. Another aspect of the invention relates to the use of a mirror carrier according to embodiments of the invention in astronomical applications or in lithographic processes, for example in LCD lithography and / or in microlithography.
    The invention is explained in more detail below with reference to figures. 1 and 2 show a composite of a mirror carrier and a base according to embodiments of the invention, FIG. 3 shows a representation of a surface of a base according to an embodiment of the invention, and FIG. 4 shows method steps for producing the mirror carrier.
    1 shows schematically and not true to scale a composite 15 composed of a base 1 and a mirror carrier 20 according to one embodiment. The mirror carrier 20 is designed in such a way that the surface with which the element 20 rests on the base 1, that is to say the bearing surface 22, is convexly curved. In contrast, the surface 4 of the base 1 is curved concavely downward in order to ensure the best possible support for the workpiece or the glass, glass ceramic or ceramic element. The support surface 22 and the surface 4 are therefore of opposite or complementary shape, in order to achieve a support of the thin mirror carrier 20 over the fullest possible area.
    Fig. 2 shows schematically and not true to scale a further embodiment of the composite 15, formed from the base 1 and a supporting mirror carrier 20, the mirror carrier 20 being designed in such a way that the bearing surface 22 with which it rests on the base 1 is concave is.
    The surface 4 of the base 1, on the other hand, is curved convexly upwards in order to ensure the best possible support for the mirror carrier 20.
    In general, in the composite 15, as it is shown schematically and not true to scale in FIGS. 1 and 2, the base 1 is used for preferably full-area support of an overlying
    Mirror carrier 20 when processing and / or transporting it.
    The base 1 comprises a material with a mean linear thermal expansion coefficient of less than or equal to 1 * 10 / K, preferably less than or equal to 0.1 * 10 / K and particularly preferably less than or equal to 0.05 * 10 5 / K or even less than or equal to 0.02 * 10- / K or even less than or equal to 0.01 * 108 / K.
    The mirror carrier 20 comprises a material with a mean linear thermal
    Expansion coefficients of likewise less than or equal to 1 * 10 ° 8 / K, preferably less than or equal to 0.1 * 108 / K and particularly preferably less than or equal to 0.05 * 105 / K or even less than or equal to 0.02 * 106 / K or even less than or equal to 0.01 * 108 / K.
    The mirror support preferably has a maximum thickness of 50 mm or less, preferably 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less and very particularly preferably 2 mm or less.
    Furthermore, the lateral dimension of the mirror carrier 20 is preferably at least 200 mm and can in particular be up to 4500 mm.
    The mirror carrier 20 has one of the following features: The mirror carrier 20 has a ratio of its lateral dimension to its maximum thickness of at least 100, more preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably 300 or more, and / or - the weight per unit area of the mirror carrier 20 is 100 kg / m or less, preferably 50 kg / m or less and particularly preferably 30 kg / m Or less.
    Are particularly preferred
    Weights of 15 kg / m and less.
    According to one embodiment of the invention, the mirror surface of the mirror carrier has a roughness Ra of at most 3.5 μm, ideally less than 1.2 μm, the
    The surface of the mirror support is preferably ground. When the mirror surface of the mirror carrier is polished, the roughness RMS is preferably less than 2 nm, in particular preferably less than 1 nm. According to yet another embodiment of the composite 15, the coefficients of thermal expansion of the material comprised by the substrate 1 and the material comprised by the mirror carrier 20 differ from one another at most by an amount of 1 * 108 / K, preferably by an amount of at most 0.1 * 10: 8 / K, particularly preferably by an amount of at most 0.05 * 10-5 / K and very particularly preferably by an amount of at most 0.02 * 108 / K. FIG. 3 shows a schematic representation, not true to scale, of a base 1 according to an embodiment of the invention, as it is also used by way of example in a composite according to one of FIGS. 1 or 2.
    The base 1 for the preferably full-surface support of an overlying mirror carrier (not shown) when it is processed and / or transported comprises a material with an average linear thermal expansion coefficient of less than or equal to 1 * 10: 6 / K, preferably less than or equal to 0, 1 * 108 / K and particularly preferably less than or equal to 20 0.05 * 108 / K and, in special embodiments, less than or equal to 0.02 * 108 / K or even less than or equal to 0.01 * 10: 8 / K, where the base preferably has a lateral dimension of at least 200 mm and / or at most 4500 mm. According to one embodiment, the surface 4 of the base 1 is arched as shown in the drawings, - the surface 4 of the base 1 is preferably approximated by an envelope curve and - the deviation from the envelope curve of the base 1 for a mirror carrier 20 is particularly preferred with a lateral dimension of at least 4000 mm, a maximum of 0.5 mm, preferably a maximum of 0.025 mm, and / or
    - preferably for a mirror carrier 20 with a lateral dimension of at least 2000 mm, at most 0.2 mm and preferably at most 0.025 mm, and / or - preferably for a mirror carrier 20 with a lateral dimension of 1200 mm or less at most 0.1 mm and preferably is at most 0.01 mm. According to yet another embodiment of the base 1, the surface 4 of the base 1 is at least partially covered with an intermediate material 13, for example a film 13, in particular with a polymer film, the intermediate material 13, such as the film, preferably having a thickness that is at least is as large as the deviation of the actual shape of the surface 4 from the envelope curve, the intermediate material 13 preferably having a maximum thickness of at most 200 μm, preferably at most 100 μm, more preferably at most 50 μm or particularly preferably even at most 25 μm.
    In addition to the above-mentioned curved design of the base, according to another embodiment, it can be flat, for example for the production of plane mirrors. According to a further embodiment of the base, the intermediate material 13 comprises polyvinyl chloride.
    The surface 4 of the base 1 is preferably only partially covered with the intermediate material 13. For example, a film can be applied to the surface as intermediate material 13, as shown here in FIG. 3, in the form of small pieces. The arrangement can in particular be regular, for example symmetrical or radially symmetrical. In one embodiment, a three-, four- or more-fold symmetry of the film pieces is provided, the film pieces preferably being round or elliptical.
    4 shows, in several partial images, method steps for producing a mirror carrier 20. First, the mirror carrier and base are prepared. As shown in part (a), a grinding tool 5, for example with a rotating grinding plate, is used to shape the surface 4 of the base 1 in accordance with a predetermined envelope curve, which is concave here by way of example. Partial image (b) shows the corresponding processing of the support surface 22 of the mirror carrier 20. The support surface 22 is provided with a curvature complementary to the surface 4.
    Once the surfaces 4, 22 have been formed, the mirror carrier 20 is placed on the base 1 and fixed, as shown in partial image (c). In this case, an intermediate material 13 can again be used in order to compensate for remaining inequalities in the surfaces and, if necessary, also cause shock absorption during the further processing of the mirror carrier 20. The fixation against a lateral displacement of the mirror carrier 20 on the base and also against detachment can take place, for example, adhesively via the intermediate material 13. In the composite 15 obtained in this way, as shown in partial image (d), the functional surface 21 can then be worked out with a grinding tool 5 with little deformation of the mirror carrier 20. The base 1 can continue to be used for processing further mirror carriers, so that when a series of several mirror carriers 20 of the same type is produced, the step according to partial image (a) only has to be carried out once. Without being limited to the example shown, the method for producing a mirror carrier 20 according to a preferred embodiment of the invention according to the above description is based on the fact that a surface 4 of the base 1 and a support surface are formed according to a predetermined shape or according to a predetermined surface profile by material-removing machining The bearing surface 22 of the mirror carrier and the surface 4 of the base 1 are formed opposite at least in the bearing areas, and the bearing surface 22 of the mirror carrier 20 and the surface 4 of the base 1 are brought together and the mirror carrier 20 is attached to the base 1, so that a composite 15 is formed, and then in the composite 15 the functional surface 21 opposite the support surface 22 is formed by material-removing machining. It is evident to the person skilled in the art that the invention is not restricted to the exemplary embodiments shown, but can be varied in many ways. The order in which the surfaces 4 and 22 are processed is not important; these can, for example, also be formed at the same time, or, unlike the illustrated order of the partial images, the support surface 22 of the mirror carrier 20 is formed first.
    LIST OF REFERENCE NUMERALS 1 base grinding tool 5 13 intermediate material
    15 composite 20 mirror carrier 21 functional surface of 20 22 support surface of 20
    4 surface of the pad
    权利要求:
    Claims (18)
    [1]
    1. Mirror carrier comprising a material with an average linear thermal expansion coefficient of less than or equal to 0.1 * 108 / K and preferably less than or equal to 0.05 * 10- / K, the mirror carrier having at least one of the following features: the mirror carrier has a ratio of its lateral dimension to its maximum thickness of at least 100, more preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably 300 or more, - the weight per unit area of the mirror carrier is 100 kg / m or less, preferably 50 kg / m or less and particularly preferably 30 kg / m and particularly preferably 15 kg / m or less, the mirror carrier having a mirror surface which has a roughness Ra of at most 3.5 µm, preferably less than 1.2 µm.
    [2]
    2. Mirror carrier according to claim 1, wherein the maximum thickness of the mirror carrier is 50 mm or less, preferably 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less and very particularly preferably 2 mm or less.
    [3]
    3. Mirror carrier according to one of claims 1 or 2, wherein the lateral dimension of the mirror carrier is at least 200 mm and / or at most 4500 mm.
    [4]
    4. Mirror carrier according to one of claims 1 to 3, wherein the surface has a roughness RMS of less than 2 nm, preferably less than 1 nm, the surface of the mirror carrier preferably being polished.
    [5]
    5. Mirror carrier according to one of claims 1 to 4, wherein the mirror carrier is a glass ceramic, preferably a lithium-aluminum-silicate glass ceramic, the lithium-aluminum-silicate glass ceramic is preferably designed as a high-quartz mixed crystal glass ceramic, a Ti-doped synthetic quartz glass and / or a ceramic, preferably a ceramic comprising cordierite and / or SiC.
    [6]
    6. Mirror, comprising a mirror carrier according to one of claims 1 to 5 and a highly reflective layer on the mirror surface of the mirror carrier.
    [7]
    7. Base (1) for preferably full-area support of a superimposed mirror carrier (20), in particular a mirror carrier (20) according to one of claims 1 to 5, during its processing and / or transport, comprising a material with an average linear thermal expansion coefficient of less or equal to 0.1 * 10: 5 / K and preferably less than or equal to 0.05 * 10: 8 / K.
    [8]
    8. A support according to claim 7, wherein the surface of the support on which the mirror support (20) rests is curved, preferably the surface of the support is approximated by an envelope curve and particularly preferably the deviation from the envelope curve of the support for one Mirror carrier with a lateral dimension of at least 4000 mm, a maximum of 0.5 mm, preferably a maximum of 0.025 mm, and / or preferably for a mirror carrier (20) with a lateral dimension of at least 2000 mm, a maximum of 0.2 mm and preferably a maximum of 0.025 mm, and / or preferably for a mirror carrier (20) with a lateral dimension of 1200 mm or less is at most 0.1 mm and preferably at most 0.01 mm.
    [9]
    9. Support according to one of claims 7 to 8, wherein the surface of the support is at least partially covered with an intermediate material (13), in particular with a film, preferably with a polymer film, the intermediate material (13) preferably having a thickness which is at least is as great as the deviation of the actual shape of the surface from the envelope curve, the intermediate material (13) preferably using a maximum thickness of at most 200 µm, preferably at most 100 µm, more preferably at most 50 µm or particularly preferably even at most 25 µm will have.
    [10]
    10. The support of claim 9, wherein the intermediate material (13) comprises polyvinyl chloride.
    [11]
    11. Base according to one of claims 9 or 10, wherein the surface (4) of the base (1) is partially covered with the intermediate material (13) in the form that the intermediate material (13) in the form of mutually spaced sections on the surface (4) is applied, so that a symmetrical, preferably a radially symmetrical, preferably a fourfold radial symmetrical arrangement of the sections of the intermediate material is formed, the sections preferably being round or elliptical.
    [12]
    12. Composite of a base (1) and a mirror carrier (20), the base (1) preferably being used to support the overlying mirror carrier (20) during its processing and / or transportation, the base (1) having a material one with an average linear thermal expansion coefficient of less than or equal to 0.1 * 108 / K and preferably less than or equal to 0.05 * 10-8 / K, wherein the mirror carrier comprises a material with an average linear thermal expansion coefficient of less than or equal to 0 , 1 * 108 / K and preferably less than or equal to 0.05 * 10-8 / K, with the mirror support preferably having a maximum thickness of 50 mm or less, preferably 20 mm or less, preferably 15 mm or less, particularly preferably 10 mm or less and very particularly preferably 2 mm or less, the lateral dimension of the mirror carrier preferably being at least 200 mm and the mirror carrier at least one of the fo has the following features: - the mirror carrier has a ratio of its lateral dimension to its maximum thickness of at least 100, preferably of at least 150 and particularly preferably of at least 200 and very particularly preferably 300 or more, - the weight per unit area of the mirror carrier is 100 kg / m or less, preferably 50 kg / m or less and particularly preferably 30 kg / m , particularly preferably 15 kg / m or less, the mirror surface preferably having a roughness of at most 3.5 µm, preferably at most 1.2 µm.
    [13]
    13. The composite according to claim 12, wherein the thermal expansion coefficients of the material encompassed by the base and the material encompassed by the mirror carrier differ from one another by a maximum of 0.1 * 10 / K, preferably by an amount of at most 0.05 * 106 / K and particularly preferably differ by an amount of at most 0.02 * 10-6 / K.
    [14]
    14. Composite according to one of claims 12 or 13, wherein the surface of the base and the surface of the mirror carrier which rests on the surface of the base are curved in opposite directions.
    [15]
    15. Composite according to one of the preceding claims, characterized in that the mirror carrier (20) is fixed laterally on the base (4), preferably wherein the mirror carrier (20) is additionally fixed to prevent detachment from the base (4).
    [16]
    16. A method for producing a mirror carrier (20), in particular a mirror carrier (20) according to one of claims 1 to 5, comprising the following steps - providing a base (1) for preferably full-surface support of a mirror carrier (20) on top, - providing a Mirror carrier (20) comprising a material with a thermal expansion coefficient of less than or equal to 0.1 * 10 / K and preferably less than or equal to 0.05 * 10- / K, - placing the mirror carrier (20) on the base (1), - mechanical reworking, in particular polishing, drilling, grinding or lapping, of a surface of the mirror carrier (20), in particular of its mirror surface (21), the thermal expansion coefficients of the material comprised by the base (1) and that comprised by the mirror carrier (20) Materials from each other at most by an amount of 0.1 * 10: 8 / K, preferably by an amount of at most 0.05 * 108 / K and particularly preferably by an amount of h differ at most 0.02 * 10- / K.
    [17]
    17. The method according to the preceding claim, wherein a surface (4) of the base (1) and a support surface (22) are formed according to a predetermined surface profile by material-removing machining, the
    Support surface (22) of the mirror support (20) and the surface (4) of the base (1) are designed to be identical, and the support surface (22) of the mirror support (20) and the surface (4) of the base (1) are brought together and the Mirror carrier (20) is attached to the base (1) so that a composite (15) is formed, and then in the composite (15) the functional surface (21) opposite the support surface (22) is formed by material-removing machining.
    [18]
    18. Use of a mirror carrier according to one of claims 1 to 5 in astronomical applications, in LCD lithography and / or in microlithography.
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    同族专利:
    公开号 | 公开日
    JP2020024416A|2020-02-13|
    FR3084936A1|2020-02-14|
    BE1026505A1|2020-02-26|
    CN110824692A|2020-02-21|
    US20200049868A1|2020-02-13|
    DE102019120284A1|2020-02-13|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US3453041A|1966-08-20|1969-07-01|Zeiss Stiftung|Light-weight optical mirror for astronomical equipment|
    EP1391433A2|2002-08-16|2004-02-25|Schott Glaswerke|Process for forming glass or glass ceramic and for making suitable mould|
    US20080099935A1|2004-11-09|2008-05-01|Wilhelm Egle|High-Precision Optical Surface Prepared by Sagging from a Masterpiece|
    DE102015112036A1|2015-07-23|2017-01-26|Schott Ag|Monolithic underlay for full surface support of a workpiece|
    法律状态:
    2020-10-12| FG| Patent granted|Effective date: 20200826 |
    优先权:
    申请号 | 申请日 | 专利标题
    DE102018119337|2018-08-08|
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